Analysis and Design Principles of MEMS Devices

By: Minhang Bao

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Hardcover | 12 April 2005

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Hardcover
328 Pages

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24.13 x 17.15 x 1.91

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6 1/2 X 9 7/16 in Chapter 1. Introduction to MEMS devices

1.1. Piezoresistive pressure sensor

1.2. Piezoresis tive Accelerometer

1.3. Capacitive Pressure Sensor, A ccelerometer and Microphone

1.4. Resonant Sensor and V ibratory Gyroscope

1.5. Micro Mechanical Electric and Optical Switches

1.6. Micro Mechanical Motors
1.7. Micro Electro Mechanical Systems

1.8 . Analysis and Design of MEMS Devices

<S TRONG>Chapter 2. Basic Mechanics of Beam and Diaphragm StructuresSTRON G>

2.1. Stress and Strain

2.2. Stre ss and Strain of Beam Structures

2.3. Vibration Frequ ency by Energy Methods

2.4. Vibration Modes and the Bu ckling of a Beam

2.5. Damped and forced vibration

2.6. Basic Mechanics of Diaphragms

2.7. Problems

Chapter 3. Air Damping STRONG>

3.1. Drag Effect of a Fluid
<BR id='CRLF micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field.

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You Can Find This Book In

Non-Fiction Science Chemistry Analytical Chemistry Earth Sciences, Geography, Environment, Planning Geography Geographical Information Systems GIS & Remote Sensing Engineering & Technology Technology in General Industrial Chemistry & Manufacturing Technologies

Introduction to MEMS devices
Basic mechanics of beam and diaphragm structures
Air Damping
Electrostatic Actuation
Capacitive Sensing and Effects of Electrical Excitation
Piezoresistive Sensing
Table of Contents provided by Publisher. All Rights Reserved.

Analysis and Design Principles of MEMS Devices

At a Glance

Hardcover

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