Booktopia has been placed into Voluntary Administration. Orders have been temporarily suspended, whilst the process for the recapitalisation of Booktopia and/or sale of its business is completed, following which services may be re-established. All enquiries from creditors, including customers with outstanding gift cards and orders and placed prior to 3 July 2024, please visit https://www.mcgrathnicol.com/creditors/booktopia-group/

Atomic Layer Deposition for Semiconductors

By: Cheol Seong Hwang (Editor)

Write A Review

eBook | 23 May 2016

At a Glance

Format
ePUB

eBook

RRP $249.00

$224.99

10%OFF

or 4 interest-free payments of $56.25 with

Instant Digital Delivery to your Booktopia Reader App

This edited volume discusses atomic layer deposition (ALD) for all modern semiconductor devices, moving from the basic chemistry of ALD and modeling of ALD processes to sections on ALD for memories, logic devices, and machines. The section on ALD for memories covers both mass-produced memories, such as DRAM and Flash, and emerging memories, such as PCRAM and FeRAM. The section on ALD for logic devices covers both front-end of the line processes and back-end of the line processes. The final section on ALD for machines looks at toolsets and systems hardware. Each chapter provides the history, operating principles, and a full explanation of ALD processes for each device.