CCD Image Sensors in Deep-Ultraviolet

Degradation Behavior and Damage Mechanisms

By: Flora Li, Arokia Nathan

Write A Review

Hardcover | 1 March 2005

At a Glance

Hardcover
244 Pages

Dimensions(cm)
23.39 x 15.6 x 1.42

Hardcover

$310.47

or 4 interest-free payments of $77.62 with

Aims to ship in 7 to 10 business days

As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspection of deep sub-micron features in integrated circuits. DUV-sensitive charge-coupled device (CCD) cameras are in demand for these applications. Although CCD cameras that are responsive at DUV wavelengths are now available, their long-term stability is still a major concern. This book describes the degradation mechanisms and long-term performance of CCDs in the DUV, along with new results of device performance at these wavelengths.

Shipping

	Standard Shipping	Express Shipping
Metro postcodes:	$9.99	$14.95
Regional postcodes:	$9.99	$14.95
Rural postcodes:	$9.99	$14.95

How to return your order

At Booktopia, we offer hassle-free returns in accordance with our returns policy. If you wish to return an item, please get in touch with Booktopia Customer Care.

Additional postage charges may be applicable.

Defective items

If there is a problem with any of the items received for your order then the Booktopia Customer Care team is ready to assist you.

For more info please visit our Help Centre.

Introduction
Overview of CCD
CCD Imaging in the Ultraviolet Regime
Silicon
Silicon Dioxide
Si-SiO2 Interface
General Effects of Radiation
Effects of Radiation on CCDs
UV-Induced Effects in Silicon
UV-Laser-Induced Effects in SiO2
UV-Laser-Induced Effects in the Si-SiO2 Interface
CCD Measurements at 157 nm
Design Optimizations for Future Research
Concluding Remarks
Glossary
Table of Contents provided by Publisher. All Rights Reserved.

CCD Image Sensors in Deep-Ultraviolet

Degradation Behavior and Damage Mechanisms

At a Glance

Hardcover

Shipping

How to return your order

Defective items

You Can Find This Book In

More in Applied Optics

The Holographic Universe

Encyclopedia of Electronic Components V3

Persistently Luminescent Materials

From Development to Applications

Next-Generation Electrochromic Devices

From Multifunctional Materials to Smart Glasses

Optical Fiber Communication Systems with MATLAB and Simulink Models

Optics and Photonics

Tailoring of Engineering Material Properties through Laser Cladding

Metallurgical, Mechanical and Tribological Properties

Nonparametric Statistics on Stratified Spaces and Their Applications in Object Data Analysis

Advances in Biophotonics, Nanofabrication, Optical Metrology and Nonlinear and Ultrafast Photonics

Proceedings of PHOTONICS 2023, Volume 3

Laser-based Techniques for Nanomaterials

Processing to Characterization

Fundamental and Applied Problems and Solutions in Terahertz-Related Devices and Technologies

Laser Additive Remanufacturing and Life Extension Technology

Additive Manufacturing Technology

Fundamentals of Laser Spectroscopy for Atoms and Diatomic Molecules

Applied Raman Spectroscopy

Concepts, Instrumentation, Chemometrics, and Life Science Applications

Optoelectronics and Spintronics in Smart Thin Films

Emerging Materials and Technologies

Essential Concepts In Metamaterials

IOP ebooks

Radar Imaging

Principle and Implementation

Lattice-Mismatched Epitaxy

HgCdTe infrared materials and detectors

Principles of Biophotonics, Volume 6

Field propagation in inhomogeneous media

Computer Vision Metrics

Survey, Taxonomy, and Analysis of Computer Vision, Visual Neuroscience, and Visual AI

Imaging Anatomy: Text and Atlas Volume 3

Bones, Joints, Muscles, Vessels, and Nerves

Fibre Optic Methods for Structural Health Monitoring

Physics of Thin Films

Mathematics for Physics and Physicists

The ESC Textbook of Cardiovascular Imaging

The European Society of Cardiology Series

This product is categorised by