Copper Interconnect Technology

By: Tapan Gupta

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Hardcover | 7 August 2009

At a Glance

Hardcover
423 Pages

Dimensions(cm)
23.5 x 15.5 x 2.54

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$264.27

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Since overall circuit performance has depended primarily on transistor properties, previous efforts to enhance circuit and system speed were focused on transistors as well. During the last decade, however, the parasitic resistance, capacitance, and inductance associated with interconnections began to influence circuit performance and will be the primary factors in the evolution of nanoscale ULSI technology. Because metallic conductivity and resistance to electromigration of bulk copper (Cu) are better than aluminum, use of copper and low-k materials is now prevalent in the international microelectronics industry. As the feature size of the Cu-lines forming interconnects is scaled, resistivity of the lines increases. At the same time electromigration and stress-induced voids due to increased current density become significant reliability issues. Although copper/low-k technology has become fairly mature, there is no single book available on the promise and challenges of these next-generation technologies. In this book, a leader in the field describes advanced laser systems with lower radiation wavelengths, photolithography materials, and mathematical modeling approaches to address the challenges of Cu-interconnect technology.

Industry Reviews

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"This book addresses the major issues encountered with the use of copper for interconnection lines in microelectronics. It combines materials, technology, and applications to address the needs of the microelectronics researcher. ... This book is filled with graphs, data, properties, applications, and methods that will provide both the graduate student in microelectronics and the working microelectronics professional with current information on copper interconnection technology. It is an outstanding reference text that provides an excellent source of information on current copper interconnect technology and future possibilities." (Electrical Insulation Magazine, Vol. 27 (2), March/April, 2011)

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You Can Find This Book In

Non-Fiction Engineering & Technology Electronics & Communications Engineering Electronics Engineering Circuits & Components Science Chemistry Inorganic Chemistry Other Technologies & Applied Sciences Applied Optics Energy Technology & Engineering Electrical Engineering

Mechanical Engineering & Materials Materials Science Technology in General Nanotechnology

Introduction	p. 1
Trends and Challenges	p. 2
Physical Limits and Search for New Materials	p. 5
Challenges	p. 6
Choice of Materials	p. 7
Why Copper (Cu) Interconnects?	p. 7
New Technologies	p. 15
Multilayer Metal Architecture	p. 15
Substrate Engineering	p. 16
An Alternate Technology for Interconnects	p. 19
Materials Used in Modern Integrated Circuits	p. 21
Properties of Copper	p. 23
Grain Size	p. 24
Melting Temperature	p. 25
Barrier Layer	p. 27
Low-K Dielectric Materials	p. 28
Polymers	p. 30
Semiconductors	p. 33
Silicon (Si)	p. 33
Challenges and Accomplishments	p. 35
Challenges	p. 35
Accomplishments	p. 35
Technologies of the 21st Century, and the Plan to Meet the Challenges	p. 38
Ultra-Shallow Junction (USJ)	p. 40
Circuit Design and Architecture Improvements	p. 41
Performance and Leakage in Low Standby Power (LSTP) Systems	p. 42
Introduction of New Materials and Integration Processes	p. ,43
Nano-Materials	p. 44
Superconductors	p. 45
Integration Processes	p. 47
Summary	p. 53
References	p. 55
Dielectric Materials	p. 67
Introduction	p. 67
Interlayer Dielectric (ILD)	p. 71
Introduction	p. 71
Mathematical Model	p. 74
Selection Criteria for an Ideal Low-K Material	p. 76
Search for an Ideal Low-K Material	p. 78
Achievement	p. 83
Impact of Low-K ILD Materials on the Cu-Damascene Process	p. 92
Deposition Techniques	p. 95
High-K Dielectric Materials	p. 97
Introduction	p. 97
Impact on Scaling and Requirements	p. 98
Search for a Suitable High-K Dielectric Material	p. 99
Deposition Technology for High-K Materials	p. 102
Summary	p. 102
References	p. 103
Diffusion and Barrier Layers	p. 111
Diffusion	p. 111
Introduction	p. 111
Transitional Effects	p. 113
Mathematical Modeling of Diffusion in Cu-Interconnects	p. 114
Grain Boundary (GB) Diffusion	p. 118
Vacancy Diffusion	p. 120
Drift Diffusion	p. 121
Interdiffusion	p. 122
Diffusion of Copper and Its Consequences	p. 122
Precipitation	p. 124
Barrier Layer for Cu-Interconnects	p. 125
Theory	p. 125
Ideal Barrier Layer	p. 126
Barrier Layer Architecture	p. 126
Interlayer Reactions	p. 128
Influence of the Barrier Layer Properties on the Reliability of Cu-Interconnects	p. 132
Low-K Dielectric-Barrier Layer	p. 135
Reaction Rates	p. 135
Influence of the Barrier Layer on the Electrical Conductivity of Cu-Lines	p. 139
Influence of Barrier Layer Thermal Conductivity on Cu-Line	p. 141
Classification of Barrier Layer	p. 144
Properties of Different Barrier Layer Materials	p. 145
Cap-Layer, Its Properties and Functions	p. 148
Summary	p. 150
References	p. 151
Pattern Generation	p. 161
Photolithography	p. 161
Introduction	p. 161
Resolution Limits of Optical Lithography	p. 164
Deep Ultraviolet (DUV) Lithography	p. 168
Reticles	p. 173
Enhancement Techniques for Resolution	p. 175
157 nm Lithography	p. 179
Chemically Amplified Resist (CA)	p. 183
Extreme Ultraviolet (EUV) Lithography	p. 185
e-Beam Lithography (EBL)	p. 189
Electron-Beam Resist	p. 192
e-Beam Reticle	p. 195
Step and Flash Imprint Lithography (SFIL)	p. 195
Etching and Cleaning of Damascene Structures	p. 197
Etching	p. 197
Cleaning	p. 210
Summary	p. 214
References	p. 216
Deposition Technologies of Materials for Cu-Interconnects	p. 223
Introduction	p. 223
Emerging Technologies	p. 224
Cu-Damascene Process	p. 224
Barrier Layer Requirements	p. 225
Deposition Requirements	p. 225
Thin Film Growth and Theory of Nucleation	p. 226
Nucleation Theory	p. 227
Instrumentation	p. 230
Physical Vapor Deposition	p. 230
Sputtering	p. 231
Ionized Physical Vapor Deposition (IPVD)	p. 234
Chemical Vapor Deposition (CVD)	p. 236
Plasma Enhanced CVD (PECVD) System	p. 236
Metal-Organic Vapor Deposition (MOCVD)	p. 238
Low Temperature Thermal CVD (LTTCVD) System	p. 240
Atomic Layer Deposition (ALD)	p. 241
Plating	p. 243
History of Electroplating and Printed Circuit Boards (PCBs)	p. 243
DC Bath Chemistry	p. 244
Electroplating of Copper Inside Damascene Architecture	p. 245
Process Chemistry for Superconformal Electrodeposition of Copper	p. 247
Electrochemical Mechanical Deposition (ECMD)	p. 248
Influence of the Seed Layer on Electroplating	p. 249
Electroless Deposition of Copper	p. 250
Stress in Cu-Interconnects	p. 251
Summary	p. 253
References	p. 254
The Copper Damascene Process and Chemical Mechanical Polishing	p. 267
The Copper Damascene Process	p. 267
Introduction	p. 267
Conventional Metallization Technology	p. 270
Cu-Damascene Metallization Technology	p. 271
General Objectives and Challenges	p. 276
Chemical Mechanical Polishing (CMP) and Planarization	p. 278
Introduction	p. 278
Chemical Mechanical Polishing (CMP) Technology	p. 279
Copper Dishing Model	p. 285
Slurry Chemistry	p. 286
Particle Size Inside the Slurry	p. 287
Relative Velocity of the Pad and Wafer	p. 289
Pad Pressure	p. 289
Pad-Elasticity	p. 289
Pad Conditioning	p. 289
Shallow Trench Isolation (STI)	p. 290
Abrasive Free Polishing	p. 291
End-Point Detection	p. 291
Dry In Dry Out	p. 292
Multi-Step Processing	p. 293
Post-CMP Cleaning	p. 293
CMP Pattern Density Issues	p. 295
Summary	p. 296
References	p. 296
Conduction and Electromigration	p. 301
Conduction	p. 301
Introduction	p. 301
Conduction Mechanism and Restrictions	p. 303
Effect of Grain Boundary (GB) Resistance on the Conductivity of Cu-Interconnects	p. 311
Effect of Grain Size and Morphology of the Substrate	p. 311
Morphology of the Cu-Film and Its Influence on the Conduction (Electrical) Mechanism of Cu-Interconnects	p. 312
Effect of Film Thickness on the Conductivity of Cu-Interconnects	p. 317
Diffusion Related Impacts on the Conductivity of a Cu-Line	p. 318
Cu-Line Stress and Its Consequences	p. 319
Conduction of Heat Through Cu-Interconnects	p. 321
Thermal Cycling (Annealing) Related Phenomena	p. 322
Electromigration (EM)	p. 324
	p. 324
Mechanism of Electromigration (EM) and Its Effects	p. 325
Void Formation	p. 329
Analytical Model on Stress Related EM	p. 330
Effect of Microstructure of the Film on Mass Migration	p. 333
Effect of Solute on Electromigration	p. 335
Melting Temperature of a Metal and Its Effect on Grain Growth	p. 335
Effect of Temperature on EM	p. 336
Current Density and Its Effect on EM	p. 336
Summary	p. 336
References	p. 337
Routing and Reliability	p. 347
Routing	p. 347
Introduction	p. 347
Methods of Improving Interconnect Routings	p. 349
Interconnect Routing Design	p. 351
Challenges with High Density Routing	p. 359
Cascaded Driver	p. 361
Transmission Line Coupling	p. 361
Clocking of High-Speed System	p. 361
Reliability	p. 362
Introduction	p. 362
Reliability Issues Related to Cu-Interconnects	p. 365
Measurements	p. 388
Summary	p. 393
References	p. 394
Glossary (Copper Interconnects)	p. 405
Index	p. 415
Table of Contents provided by Ingram. All Rights Reserved.

Copper Interconnect Technology

At a Glance

Hardcover

Industry Reviews

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