Design for Manufacturability and Statistical Design

A Constructive Approach

By: Michael Orshansky, Sani Nassif, Duane Boning

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Hardcover | 3 December 2007

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328 Pages

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23.5 x 15.88 x 1.91

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Design for Manufacturability and Statistical Design: A Constructive Approach provides a thorough treatment of the causes of variability, methods for statistical data characterization, and techniques for modeling, analysis, and optimization of integrated circuits to improve yield. The objective of the constructive approach developed in this book is to formulate a consistent set of methods and principles necessary for rigorous statistical design and design for manufacturability from device physics to large-scale circuit optimization. The segments of the book are devoted, respectively, to

understanding the causes of variability;
design of test structures for variability characterization;
statistically rigorous data analysis;
techniques of design for manufacturability in lithography and in chemical mechanical polishing;
statistical simulation, analysis, and optimization techniques for improving parametric yield.

Design for Manufacturability and Statistical Design: A Constructive Approach presents an overview of the methods that need to be mastered for state-of-the-art design for manufacturability and statistical design methodologies. It is an important reference for practitioners and students in the field of computer-aided design of integrated circuits.

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You Can Find This Book In

Non-Fiction Computing & I.T.Graphical & Digital Media Applications Computer-Aided Design CAD Engineering & Technology Electronics & Communications Engineering Electronics Engineering Circuits & Components Mechanical Engineering & Materials Production & Industrial Engineering Technology in General Engineering in General

Introduction	p. 1
Rise of Layout Context Dependence	p. 2
Variability and Uncertainty	p. 3
Characterization vs. Modeling	p. 5
Model to Hardware Matching	p. 6
Design for Manufacturability vs. Statistical Design	p. 6
Sources of Variability
Front End Variability	p. 11
Introduction	p. 11
Variability of Gate Length	p. 15
Gate Length Variability: Overview	p. 15
Contributions of Photolithography	p. 17
Impact of Etch	p. 22
Line Edge Roughness	p. 22
Models of L[subscript gate] Spatial Correlation	p. 24
Gate Width Variability	p. 26
Threshold Voltage Variability	p. 27
Thin Film Thickness	p. 32
Lattice Stress	p. 35
Variability in Emerging Devices	p. 36
Physical Variations Due to Aging and Wearout	p. 39
Summary	p. 40
Back End Variability	p. 43
Introduction	p. 43
Copper Cmp	p. 44
Copper Electroplating	p. 47
Multilevel Copper Interconnect Variation	p. 50
Interconnect Lithography and Etch Variation	p. 52
Dielectric Variation	p. 53
Barrier Metal Deposition	p. 54
Copper and Via Resistivity	p. 55
Copper Line Edge Roughness	p. 56
Carbon Nanotube Interconnects	p. 56
Summary	p. 57
Environmental Variability	p. 59
Introduction	p. 59
Impact of Environmental Variability	p. 60
Analysis of Voltage Variability	p. 65
Power Grid Analysis	p. 66
Estimation of Power Variability	p. 69
Systematic Analysis of Temperature Variability	p. 72
Other Sources of Variability	p. 80
Summary	p. 80
Variability Characterization and Analysis
Test Structures for Variability	p. 83
Test Structures: Classification and Figures of Merit	p. 83
Characterization Using Short Loop Flows	p. 85
Transistor Test Structures	p. 90
Digital Test Structures	p. 93
Summary	p. 96
Statistical Foundations of Data Analysis and Modeling	p. 97
A Brief Probability Primer	p. 98
Empirical Moment Estimation	p. 100
Analysis of Variance and Additive Models	p. 102
Case Studies: Anova for Gate Length Variability	p. 105
Decomposition of Variance Into Spatial Signatures	p. 109
Spatial Statistics: Data Analysis and Modeling	p. 113
Measurements and Data Analysis	p. 113
Modeling of Spatial Variability	p. 116
Summary	p. 119
Design Techniques for Systematic Manufacturability Problems
Lithography Enhancement Techniques	p. 123
Fundamentals of Lithography	p. 124
Process Window Analysis	p. 129
Optical Proximity Correction and Srafs	p. 133
Subresolution Assist Features	p. 136
Phase Shift Masking	p. 138
Non-Conventional Illumination and Impact on Design	p. 144
Nominal and Across Process Window Hot Spot Analysis	p. 145
Timing Analysis Under Systematic Variability	p. 147
Summary	p. 149
Ensuring Interconnect Planarity	p. 151
Overview of Dummy Fill	p. 152
Dummy Fill Concept	p. 155
Algorithms for Metal Fill	p. 155
Dummy Fill for Sti Cmp and Other Processes	p. 159
Summary	p. 159
Statistical Circuit Design
Statistical Circuit Analysis	p. 163
Circuit Parameterization and Simulation	p. 163
Introduction to Circuit Simulation	p. 163
MOSFET Devices and Models	p. 165
MOSFET Device Characterization	p. 167
Statistical Device Characterization	p. 170
Principal Component Analysis	p. 171
Worst-Case Analysis	p. 175
Worst-Case Analysis for Unbounded Parameters	p. 176
Worst-Case Analysis Algorithm	p. 177
Corner-Based Algorithm	p. 179
Worst-Case Analysis Example	p. 179
Statistical Circuit Analysis	p. 185
A Brief SRAM Tutorial	p. 185
Monte Carlo Analysis	p. 187
Response-Surface Analysis	p. 189
Variance Reduction and Stratified Sampling Analysis	p. 192
Summary	p. 195
Statistical Static Timing Analysis	p. 197
Basics of Static Timing Analysis	p. 198
Impact of Variability on Traditional Static Timing Verification	p. 201
Increased Design Conservatism	p. 201
Cost of Full Coverage and Danger of Missing Timing Violations	p. 203
Statistical Timing Evaluation	p. 206
Problem Formulation and Challenges of SSTA	p. 207
Block-Based Timing Algorithms	p. 209
Path-Based Timing Algorithms	p. 217
Parameter Space Techniques	p. 223
Monte Carlo SSTA	p. 226
Statistical Gate Library Characterization	p. 230
Summary	p. 233
Leakage Variability and Joint Parametric Yield	p. 235
Leakage Variability Modeling	p. 235
Joint Power and Timing Parametric Yield Estimation	p. 240
Summary	p. 245
Parametric Yield Optimization	p. 247
Limitations of Traditional Optimization for Yield Improvement	p. 247
Statistical Timing Yield Optimization	p. 254
Statistical Circuit Tuning	p. 254
Linear Programming under Uncertainty	p. 259
Techniques for Timing and Power Yield Improvement	p. 266
Summary	p. 272
Conclusions	p. 273
Appendix: Projecting Variability	p. 275
References	p. 285
Index	p. 303
Table of Contents provided by Ingram. All Rights Reserved.

Design for Manufacturability and Statistical Design

A Constructive Approach

At a Glance

Hardcover

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How to return your order

Defective items

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