Handbook of Semiconductor Silicon Technology

This handbook is a comprehensive summary of the science, technology and manufacturing of semiconductor silicon material. Every known property of silicon is detailed. A complete set of silicon binary phase diagrams is included. Practical aspects such as materials handling, safety, impurity and defect reduction are also discussed in depth. Fundamentals in the areas of silicon precursor compounds, polysilicon, silicon crystal growth, water fabrication, expitaxial and CVD deposition are addressed by experts in each of these areas. Materials properties covered include electrical, optical and mechanical properties, deep level impurities and carrier lifetime, and thermochemistry, as well as specific sections on oxygen, carbon and nitrogen impurities. The book contains an extensive set of references, tables of materials contents, and silicon properties, and a presentation on the state of the art of materials manufacturing. Contents Include: Silicon Precursors: Their Manufacture and Properties: Precursor Manufacture Safety. Polysilicon Preparation: Polysilicon Production Technology Alternative Chlorine-Based, Semiconductor Grade, Polysilicon Feedstocks Alternative Polysilicon Reactor Selections. Crystal Growth of Silicon: Melt Growth Theory Novel Czochralski Crystal Growth Trends in Silicon Crystal Growth. Silicon Wafer Preparation: Crystal Shaping, Wafering Edge Rounding, Lapping Polishing, Cleaning In-Process Measurements. Silicon Epitaxy: Surface Preparation for Silicon Epitaxial Growth Growth of Silicon Epitaxy by CVD Dopant Incorporation Equipment for Epitaxy by CVD. Silicon Material Properties: Crystallographic Properties Electrical Properties Optical Properties Thermal and Mechanical Properties. Oxygen, Carbon and Nitrogen in Silicon: Oxygen Cluster and Precipitate Formation Mechanical Strengthening and Wafer Warpage Device Processing. Carrier Lifetimes in Silicon: Recombination Lifetimes Generation Lifetimes Role of Lifetimes on Device Currents Lifetime Measurement Techniques. Preparation and Properties of Polycrystallin-Silicon Films: Deposition Structure Oxidation Conduction Applications. Phase Diagrams: Phase Changes Segregation Coefficient and Zone Refining Retrograde Solubility.