High Resolution Focused Ion Beams

FIB and its Applications : The Physics of Liquid Metal Ion Sources and Ion Optics and Their Application to Focused Ion Beam Technology

By: Jon Orloff, Lynwood Swanson, Mark Utlaut

Write A Review

Hardcover | 31 October 2002

At a Glance

Hardcover
324 Pages

Dimensions(cm)
23.39 x 15.6 x 1.91

Hardcover

$349.17

or 4 interest-free payments of $87.29 with

or

Aims to ship in 7 to 10 business days

The authors have attempted in this book, to produce a reference on high resolution focused ion beams (FIBs) that should be useful for both the user and the designer of FIB instrumentation. They have included a mix of theory and applications. The field of FIBs has advanced rapidly since the application of the first field emission ion sources in the early 1970s. The development of the liquid metal ion source (LMIS) in the late 1960s and early 1970s and its application for FIBs in the late 1970s has resulted in a powerful tool for research and for industry. The authors have tried to cover the essential topics needed to understand what FIB technology is, how and why it works, and how it is applied. To this end they have included a chapter on the physics of the LMIS that includes practical information on these important ion sources, and two chapters that provide an introduction to ion optics and a "practical" discussion of ion optics as it is used in the FIB system today. Because FIBs are so often used to alter materials they have included a chapter on the interaction of ions with matter. The final chapter is a comprehensive coverage of FIB applications up to the year 2000.

Shipping

	Standard Shipping	Express Shipping
Metro postcodes:	$9.99	$14.95
Regional postcodes:	$9.99	$14.95
Rural postcodes:	$9.99	$14.95

How to return your order

At Booktopia, we offer hassle-free returns in accordance with our returns policy. If you wish to return an item, please get in touch with Booktopia Customer Care.

Additional postage charges may be applicable.

Defective items

If there is a problem with any of the items received for your order then the Booktopia Customer Care team is ready to assist you.

For more info please visit our Help Centre.

More in Nuclear Physics

The Making Of The Atomic Bomb

Paperback

RRP $49.99

$38.75

22%
OFF

The Power of Nuclear

Hardcover

$50.25

50 Years of Quarks

Paperback

RRP $86.99

$82.75

Universe And The Atom, The

Hardcover

RRP $178.99

$170.25

WAVES AND PARTICLES

TWO ESSAYS ON FUNDAMENTAL PHYSICS

Paperback

RRP $34.99

$33.25

WHAT IS CALCULUS?

FROM SIMPLE ALGEBRA TO DEEP ANALYSIS

Paperback

RRP $68.99

$65.75

Quantum-Chemical Calculation of Unique Molecular Systems, Two-Volume Set : Aap Research Notes on Chemical Engineering - Vladimir A. Babkin

$66.25

Introduction	p. 1
Field Ionization Sources	p. 5
Gas Field Ionization Sources	p. 5
Liquid Metal Field Ionization Sources	p. 11
Physics of Liquid Metal Ion Sources	p. 21
Introduction	p. 21
Theory of Lmis Operation	p. 22
Early Experiments on Emission of Ions from Liquid Metals (PRE-1975)	p. 23
Ion Production	p. 25
Theoretical Description of Lmis Behavior	p. 27
Experimental Studies of Lmis Shape	p. 36
Later Theoretical Developments: Characterization of Emission	p. 37
Liquid Flow Characteristics in the Lmis	p. 41
The Effect of Space Charge on Ion Emission and the Shape of the I-V Characteristic	p. 44
Low Current Emission	p. 48
Conclusions Regarding Lmis Theory	p. 51
Lmis Emission Characteristics	p. 51
Elements and Alloys Used in Lmis	p. 52
Energy Distributions	p. 52
Angular Intensity and Distributions	p. 59
Noise	p. 61
Source Lifetime	p. 62
Emitter Fabrication and Testing Methods	p. 63
Properties of Materials Used in Lmis	p. 66
Ion Optics for Lmis	p. 79
Introduction	p. 79
Optical Properties of the Lmis	p. 80
Review of Charged Particle Optics	p. 83
The Refractive Power of an Electrostatic Lens	p. 84
The Paraxial Ray Equation	p. 86
Application of the Paraxial Ray Equation	p. 88
Lens Aberrations	p. 89
Ion Focusing Systems for Field Emission Ion Sources	p. 94
Wave Optics	p. 97
Ion Optical Formalism and Resolution	p. 107
Space Charge Effects	p. 114
Limits of Resolution	p. 115
Focusing System Design Considerations	p. 118
Interaction of Ions with Solids	p. 123
Introduction	p. 123
Energy Losses	p. 125
Nuclear Losses	p. 125
Electronic Losses	p. 127
Channeling	p. 130
Damage to the Sample	p. 133
Sputtering	p. 137
Practical Focused Ion Beam Optics and Systems	p. 147
Introduction	p. 147
Sources	p. 147
Practical Focusing Optics	p. 152
Lens Design	p. 156
The Deflection System	p. 157
E x B Mass Filter Design	p. 158
Beam Alignment Techniques	p. 159
Real Lens Defects	p. 161
Magnetic Field Perturbations	p. 166
Insulator Shielding	p. 166
Coulomb Beam Interactions	p. 166
Wave Optics vs. Geometrical Optics	p. 171
How to Evaluate the Performance	p. 173
Detectors and Imaging	p. 184
Ion Microscopy: Using Both Ions and Electrons to Image	p. 192
Collecting Information: Forming Good Images	p. 192
Imaging and Milling Vexations Due to Charging	p. 196
Applications of Focused Ion Beams	p. 205
Introduction	p. 205
Micro-Machining	p. 207
Making a Cross-Section Cut	p. 213
Tem Sample Preparation	p. 219
Using Sample Damage to Advantage	p. 224
Deposition of Materials	p. 224
Enhanced Etch and Deposition	p. 236
Enhanced Etch	p. 236
Deposition	p. 238
Scanning Ion Microscopy (SIM)	p. 245
Micro-Milling Copper	p. 272
Access to Die Circuitry from the "Backside"	p. 253
Secondary Ion Mass Spectrometry (FIB/SIMS): The Exploitation of Destruction	p. 255
FIB Implantation	p. 267
FIB Lithography	p. 277
Micro-Mechanical Devices (MEMS)	p. 279
Elements of the Theory of Field Desorption and Ionization	p. 291
Table of Sputter Yields	p. 295
Index	p. 297
About the Authors	p. 303
Table of Contents provided by Ingram. All Rights Reserved.

High Resolution Focused Ion Beams

FIB and its Applications : The Physics of Liquid Metal Ion Sources and Ion Optics and Their Application to Focused Ion Beam Technology

At a Glance

Hardcover

Shipping

How to return your order

Defective items

You Can Find This Book In

Other Editions and Formats

Paperback

More in Nuclear Physics

The Making Of The Atomic Bomb

The Power of Nuclear

50 Years of Quarks

Universe And The Atom, The

WAVES AND PARTICLES

TWO ESSAYS ON FUNDAMENTAL PHYSICS

WHAT IS CALCULUS?

FROM SIMPLE ALGEBRA TO DEEP ANALYSIS

Quantum-Chemical Calculation of Unique Molecular Systems, Two-Volume Set

Aap Research Notes on Chemical Engineering

Two-dimensional Self and Product Cubic Systems, Vol. II

Nuclear Instrumentation and Control

Nondestructive Assay of Nuclear Materials for Safeguards and Security

The Nuclear Chronicles

Design Research on the Landscapes of the US Nuclear Highway

Geometry at the Quantum Scale

Understanding the Geometric Language of Relativistic Quantum Mechanics

Advanced Image Processing for Nuclear Medicine Practice

Physics and Engineering in Medicine and Biology

The Physics of Stars

Structure, Evolution and Properties

Proceedings of the International Conference on Future Prospects in Neutrino and Astroparticle Physics

Icfpnap 2024; 23-24 Jan; Assam; India

Atomic Dreams

The New Nuclear Evangelists and the Fight for the Future of Energy

Radioactivity

A Natural Phenomenon

Radioactivity

A Natural Phenomenon

Radioactivity

Anthropogenic Sources

Radioactivity

Anthropogenic Sources

Detectors in High-Energy Physics Experiments

Underlying Physics, Working Principles, and Realizations

Supramolecular Complexes of Oxoporphyrinogens with Organic Molecules

Springer Theses

Redox Signaling in Wound Healing in Elderly Populations

Clinical Approach, Part 2: Volume 3

Six Minutes to Winter

Nuclear War and How to Avoid It

This product is categorised by

Popular Searches