Mems

A Practical Guide to Design, Analysis and Applications

By: Jan Korvink, Oliver Paul

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Hardcover | 31 December 2006

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Does MEMS technology offer advantages to your company's products? Will miniature machines on a chip solve your application objectives for osmaller, better, cheaper, and faster'oe If you are a product development engineer or manager, the decision to design a MEMS device implies having an application and market. This book offers you a practical guide to making this important business decision. Here, both veterans and newcomers to MEMS device design will get advice on evaluating MEMS for their business, followed by guidance on selecting solutions, technologies and design support tools. You will see how experts from around the world have explored MEMS possibilities and achieved new breakthrough devices such as RF-MEMS for mobile telecommunications, micro-optics for internet hardware, catheter-based minimal-invasive operating theatre tools, and in vivo monitoring of exact dosage of medication in ailing patients. This handbook offers a wealth of analytical techniques treating problematic areas such as alternative designs reliability, packaging, and cost effectiveness.

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"The editors have done an excellent job in providing a handbook that will help companies maintain their competitive advantage now and into the future. u Wolfgang Menz, The Albert Ludwig University

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Non-Fiction Engineering & Technology Energy Technology & Engineering Electrical Engineering Electronics & Communications Engineering Electronics Engineering Electronic Devices & Materials Semi-Conductors & Super-Conductors Microprocessors Technology in General

Foreword	p. xvii
Preface	p. xix
Microtransducer Operation	p. 1
Introduction	p. 1
Transduction	p. 2
Signal Domains	p. 2
Block Schematics of Transducers	p. 6
Transduction Effects	p. 12
Microsystem Performance	p. 13
Figures of Merit	p. 13
Sensitivity, Selectivity, and Offset	p. 18
Noise	p. 21
Transducer Operation Techniques	p. 26
Calibration	p. 26
Compensation	p. 28
Stabilization	p. 36
Multiple Measurements	p. 38
Circuitry	p. 42
Powering Microsystems	p. 44
Local Energy Storage	p. 44
Miniaturized Fuel Cells	p. 45
Optical and Electromagnetic Energy Transmission	p. 46
Energy Harvesting	p. 47
References	p. 48
Material Properties: Measurement and Data	p. 53
Introduction	p. 53
Measurement Methods	p. 55
Internal Stress ([sigma])	p. 55
Young's Modulus (E)	p. 58
Poisson's Ratio	p. 61
Yield Strength and Fracture Strength	p. 62
Fracture Toughness	p. 68
Fatigue	p. 69
Thermal Conductivity and Specific Heat	p. 70
Data	p. 74
Si	p. 74
Poly-Si	p. 75
Metal	p. 82
Dielectrics	p. 84
References	p. 87
MEMS and NEMS Simulation	p. 93
Introduction	p. 93
Simulation Scenario	p. 93
Generic Organization of a Computational Tool	p. 101
Graphical User Interface or Front End	p. 101
Input Files and Parsing	p. 102
Preprocessing	p. 102
Solving	p. 103
Post-Processing and Program Interfacing	p. 109
Methods for Materials Simulation	p. 111
Computational Methods that Solve PDEs	p. 122
Design Automation Methods	p. 138
Case Studies	p. 159
Summary	p. 180
Acknowledgments	p. 182
References	p. 182
System-Level Simulation of Microsystems	p. 187
Introduction	p. 187
Behavioral Modeling of MEMS Components	p. 193
Micromechanical Plates	p. 193
Micromechanical Flexures	p. 195
Electrostatic Gaps	p. 199
Reduced-Order Modeling	p. 205
Formulation of Equations of Motion	p. 209
Structured Design Tools	p. 215
Signal-Flow Simulations	p. 216
Conservative Network Simulations	p. 216
Analog Hardware Description Languages	p. 218
A Structured MEMS Methodology	p. 220
Conclusions	p. 224
References	p. 224
Thermal-Based Microsensors	p. 229
Introduction	p. 229
Thermoresistors	p. 230
Metal Film Thermoresistors	p. 230
Semiconducting Thermoresistors	p. 232
Silicon Spreading Resistance Temperature Sensor	p. 234
Thermoresistors for the Detection of Thermal Radiation	p. 235
Pellistors	p. 238
Silicon Diodes and Transistors as Thermal Microsensors	p. 240
Thermoelectric Microsensors	p. 243
Microthermopiles as IR Radiation Detectors	p. 250
Thermopile Arrays	p. 251
Thermoelectric Vacuum Microsensors	p. 255
Gas Flow Microsensors	p. 257
AC/DC Thermoconverter	p. 258
Heat Flux Sensors	p. 259
Microelectromechanical Thermoelectric Cooler	p. 262
CMOS-Compatible Thermal-Based Microsensors and Microactuators	p. 266
Diagnostic Thermal-Based Microstructures	p. 273
Thermoelectric Microtips for AFM Temperature Sensors	p. 273
Diagnostic Microstructures for the Investigation of Thermal Properties of Thin Films	p. 275
Conclusion	p. 276
References	p. 276
Photon Detectors	p. 281
Introduction	p. 281
Detectors	p. 284
Mo/a-Si:H Schottky Diode X-Ray Image Sensors	p. 284
ITO/a-Si:H Schottky Diode Optical Image Sensors	p. 289
ITO/p-i-n Optical Image Sensors	p. 293
Thin-Film Transistors	p. 296
TFT Structures and Operation	p. 296
Threshold Voltage (VT) Metastability	p. 299
Pixel Integration	p. 308
Imaging Arrays	p. 314
Conventional Passive Pixel Sensor Arrays	p. 314
Amorphous Silicon Current-Mediated Active Pixel Sensor Arrays	p. 320
Amorphous Silicon Voltage-Mediated Active Pixel Sensor Arrays	p. 324
Integrated Amorphous Silicon Multiplexers for Imaging Arrays	p. 331
New Challenges in Large-Area Digital Imaging	p. 334
References	p. 338
Free-Space Optical MEMS	p. 345
Introduction	p. 345
General Discussion of Micromirror Scanners	p. 346
Electrostatic Scanners	p. 349
Scanners with Electrostatic Parallel-Plate Actuators	p. 351
Electrostatic Vertical Comb-Drive Scanners	p. 356
Scanning Mirrors with Magnetic and Electromagnetic Actuators	p. 361
Micromirror Arrays with Mirror Size [less than or equal] 100 Micrometers	p. 364
Micromirrors for Dynamic Spectral Equalizers	p. 370
2-D MEMS Optical Switches	p. 370
Switch Configuration, Requirements, and Expendability	p. 370
Vertical Chopper-Type Switch	p. 376
Switch with Pop-Up Mirrors	p. 380
2 x 2 Switches	p. 383
Optical Attenuator Array	p. 386
Tunable WDM Devices	p. 388
Tunable Filters	p. 388
Tunable Lasers and Detectors	p. 390
Diffractive Optical MEMS	p. 390
Summary	p. 394
Acknowledgment	p. 394
References	p. 394
Integrated Micro-Optics	p. 403
Introduction	p. 403
Definitions	p. 403
Components	p. 403
Summary	p. 404
Guided Waves	p. 405
Reflections at Boundaries	p. 405
Ray-Optic Model	p. 409
Modes and Propagation	p. 413
Electromagnetic Model	p. 416
Confinement Factor	p. 418
Solving a Waveguide	p. 420
Stripe Waveguides	p. 421
Stripe Waveguide Structures	p. 422
Stripe Waveguide Modeling	p. 426
Input/Output Coupling	p. 429
End-Fire Coupling	p. 430
Butt Coupling	p. 431
Numerical Aperture	p. 432
Tapers	p. 433
Waveguide Characterization	p. 434
Modes	p. 434
Losses	p. 435
Integrated Optical Devices	p. 438
Couplers	p. 438
Interferometers	p. 441
Active Optical Devices	p. 444
Materials	p. 445
Silicon	p. 446
GaAs	p. 446
Glass	p. 447
Plastics	p. 448
Applications	p. 448
Application Example: Monolithic Displacement Sensors	p. 448
References	p. 450
Microsensors for Magnetic Fields	p. 453
Introduction	p. 453
Magnetic Fields for Different Applications	p. 453
Methods for Sensing and Applications of Magnetic Fields	p. 454
(Micro) Sensors for a Magnetic Field	p. 456
Main Figures of Merit of Magnetic Microsensors	p. 457
Classification of Magnetic Sensors: Figures of Merit	p. 457
Characteristics Related to OUT(B)[subscript C]	p. 457
Characteristics Related to OUT(C)[subscript B]	p. 462
Characteristics Related to the SD	p. 463
Hall Microsensors	p. 463
The Lorentz Force	p. 463
Hall Effect	p. 464
Hall Effect as Sensor Action	p. 464
Hall Voltage Mode of Operation	p. 466
Hall Current Mode of Operation	p. 470
Diode Hall Effect	p. 471
Hall Effect Devices	p. 471
Magnetoresistors	p. 478
Physical Magnetoresistance Effect	p. 481
Geometrical Magnetoresistance Effect	p. 481
Semiconductor Magnetoresistors	p. 482
Spin-Dependent Magnetoresistance	p. 483
GMR Sensors	p. 484
Magnetodiodes	p. 484
Magnetoconcentration and Magnetodiode Effects	p. 484
Magnetodiode Microsensors	p. 485
Magnetotransistors and Related Microsensors	p. 488
General Approach to Bipolar Magnetotransistor Design	p. 488
Principles of BMT Operation	p. 490
BMT Microsensors	p. 491
Sensors Related to the BMTs	p. 494
Magnetic Field-based Functional Multisensors	p. 495
Functional Approach to Multisensors	p. 495
Linear Multisensors for Magnetic Field and Temperature	p. 495
Linear Multisensor for Magnetic Field, Temperature, and Light	p. 498
Functional Gradiometer Microsensors	p. 499
2-D and 3-D Vector Microsystems for Magnetic Fields	p. 500
Interfaces and Improvement of Characteristics of Magnetic Microsensors	p. 502
Biasing Circuits and Signal Processing Electronics	p. 502
Improvement of Magnetosensor Characteristics	p. 507
Magnetic Systems for Contactless Measurements	p. 512
Conclusions and Outlook	p. 514
References	p. 516
Mechanical Microsensors	p. 523
Introduction	p. 523
Automotive	p. 524
Computers and Peripherals	p. 525
Consumer Products	p. 525
Medical and Biological Applications	p. 526
Inertial Sensors	p. 527
Accelerometers	p. 528
Yaw-Rate Sensors	p. 539
Pressure Sensors	p. 550
Fundamentals	p. 550
Bulk-Micromachined Pressure Sensors	p. 551
Surface-Micromachined Pressure Sensors	p. 553
Signal Generation	p. 554
Force and Torque Sensors	p. 560
Linking the Macro World to the Micro World	p. 561
Fabrication, Protection, Test, and Calibration	p. 561
Conclusions	p. 563
References	p. 563
Semiconductor-Based Chemical Microsensors	p. 567
Introduction	p. 567
Thermodynamics of Chemical Sensing	p. 574
Chemomechanical Sensors	p. 580
Rayleigh SAW Devices	p. 583
Flexural-Plate-Wave or Lamb-Wave Devices	p. 586
Resonating Cantilevers	p. 589
Thermal Sensors	p. 591
Catalytic Thermal Sensors (Pellistors)	p. 592
Thermoelectric or Seebeck-effect Sensors	p. 595
Optical Sensors	p. 598
Integrated Optics	p. 603
Microspectrometers	p. 608
Bioluminescent Bioreporter Integrated Circuits	p. 611
Surface Plasmon Resonance Devices	p. 613
Electrochemical Sensors	p. 615
Voltammetric Sensors	p. 617
Potentiometric Sensors	p. 622
Conductometric Sensors	p. 636
Combinations of Electrochemical Principles	p. 646
Acknowledgments	p. 648
References	p. 648
Microfluidics	p. 667
Introduction	p. 667
Properties of Fluids	p. 670
Volumes and Length Scales	p. 670
Mixtures	p. 671
Physical Properties	p. 672
Vapor Pressure	p. 673
Surface Tension	p. 673
Electrical Properties	p. 674
Optical Properties	p. 674
Transport Phenomena	p. 675
Physics of Microfluidic Systems	p. 678
Navier-Stokes Equations	p. 678
Laminar Flow	p. 679
Dynamic Pressure	p. 680
Fluidic Networks	p. 682
Heat Transfer	p. 683
Interfacial Surface Tension	p. 685
Electrokinetics	p. 686
Fabrication Technologies	p. 689
Silicon	p. 690
Plastics	p. 692
Quartz	p. 694
Glass	p. 695
Flow Control	p. 696
Check Valves	p. 697
Capillary Breaks	p. 698
Active Microvalves	p. 699
Micropumps	p. 702
Microdisplacement Pumps	p. 702
Charge-Induced Pumping Mechanisms	p. 703
Other Pumping Mechanisms	p. 703
Sensors	p. 703
Flow Sensors	p. 704
Chemical Sensors	p. 706
Pipettes and Dispensers	p. 707
Pipettes	p. 707
Dispensers	p. 708
Microarrays	p. 709
Concept	p. 709
Fabrication	p. 710
Particle-Based Microarray Concepts	p. 712
Microreactors	p. 713
Micromixers	p. 713
Heat Exchangers	p. 714
Chemical Reactors	p. 715
Microanalytical Chips	p. 715
Lab-on-a-Chip Systems	p. 715
Chip-Based Capillary Electrophoresis	p. 716
References	p. 717
Biomedical Systems	p. 729
Introduction and Overview	p. 729
Materials and Fabrication Techniques	p. 730
Material Requirements	p. 730
Fabrication Techniques	p. 733
Surgical Systems	p. 735
Sensors	p. 738
Motion Control	p. 738
Microinstruments	p. 739
Tissue Repair	p. 739
Therapeutic Systems	p. 742
Implantable Delivery Systems	p. 743
Mechanical Delivery Systems	p. 744
Summary	p. 745
References	p. 746
Microactuators	p. 751
Introduction	p. 751
Actuators: Transducers with Mechanical Output	p. 752
Transduction Mechanisms	p. 752
Scaling Advantages and Issues	p. 753
Electrical Microactuators	p. 754
Electrostatic Forces	p. 755
Electrostatic Systems	p. 755
Forces in Electrostatic Systems	p. 759
Scaling Properties	p. 760
Electrostatic Microactuator Configurations	p. 765
Gap-Closing Electrostatic Microactuators	p. 766
Examples of Gap-Closing Electrostatic Microactuators	p. 770
Constant-Gap Electrostatic Microactuators	p. 778
Examples of Constant-Gap Electrostatic Microactuators	p. 780
Hybrid Electrostatic Microactuators	p. 785
Electrostatic Induction	p. 786
Issues and Challenges	p. 787
Piezoelectric Microactuators	p. 787
Piezoelectric Energy Density	p. 789
Piezoelectric Microactuator Configurations	p. 790
Piezoelectric Microactuator Design Issues	p. 795
Electrostriction, Electrets, and Electrorheological Fluids	p. 797
References	p. 797
Micromachining Technology	p. 805
Introduction	p. 805
Bulk Micromachining	p. 805
Wet Etching	p. 806
High-Aspect-Ratio Micromachining	p. 816
Surface Micromachining	p. 824
Basic Process Sequence	p. 824
Materials and Etching	p. 825
Epi-Micromachining	p. 829
SIMPLE	p. 829
SCREAM	p. 830
Black Silicon	p. 831
MELO	p. 832
Porous Silicon	p. 833
SIMOX	p. 834
Epi-Poly	p. 835
Release and Stiction	p. 836
IC Compatibility Issues	p. 837
Compatible Bulk Micromachining	p. 837
Compatible Surface Micromachining	p. 840
Compatible Epi-Micromachining	p. 844
Conclusions	p. 844
References	p. 845
LIGA Technology for R&D and Industrial Applications	p. 853
Introduction	p. 853
The LIGA Process	p. 854
Mask Making	p. 857
Deep X-Ray Lithography	p. 859
Electroplating and Micromolding	p. 862
Sacrificial Layer Technique	p. 865
UV-LIGA Based on UV Lithography	p. 867
Application in Modular Micro-Optical Systems	p. 867
Definition of a Modular Micro-Optical System	p. 867
Multifiber Connector from Polymer	p. 869
Heterodyne Receiver	p. 871
Spectrometer	p. 874
Distance Sensor	p. 874
Optical Cross-Connect with Rotating Mirrors	p. 876
Oscillating Modulator for Infrared Light	p. 876
Laser Scanner for Barcode Reading Actuated by Electromagnetics	p. 879
FTIR Spectrometer for Infrared Light	p. 881
Ultra-High X-Ray Lenses in SU8	p. 884
Mechanical Applications	p. 885
Cycloid Gear System	p. 885
LIGA Gyroscope	p. 889
Microturbines for Cardiac Catheters	p. 891
Watch Pieces Made by UV-LIGA	p. 891
Outlook	p. 895
Acknowledgments	p. 896
References	p. 897
Interface Circuitry and Microsystems	p. 901
Introduction	p. 901
Microsensor Systems	p. 902
Microsensor System Applications	p. 905
Automotive Sensors	p. 907
Biomedical Sensors	p. 908
Sensors for Household Appliances, Building Control, and Industrial Control	p. 908
Environmental Sensors	p. 909
Interface Circuit Architecture	p. 909
Requirements and Specifications	p. 910
Analog Front-End	p. 912
Voltage Output	p. 912
Current or Charge Output	p. 916
Impedance Variation	p. 918
A/D Converter	p. 921
Digital Processing and Output Interface	p. 931
Digital Signal Processing	p. 931
Wired Output Interfaces	p. 931
Wireless Output Interfaces	p. 933
Conclusions	p. 934
References	p. 934
Contributors	p. 943
Index	p. 945
Table of Contents provided by Ingram. All Rights Reserved.

Mems

A Practical Guide to Design, Analysis and Applications

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