NANOFABRICATION

FUNDAMENTALS & APPN

By: TSENG AMPERE A

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Paperback | 18 March 2008

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584 Pages

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Many of the devices and systems used in modern industry are becoming progressively smaller and have reached the nanoscale domain. Nanofabrication aims at building nanoscale structures, which can act as components, devices, or systems, in large quantities at potentially low cost. Nanofabrication is vital to all nanotechnology fields, especially for the realization of nanotechnology that involves the traditional areas across engineering and science. This is the first book solely dedicated to the manufacturing technology in nanoscale structures, devices, and systems and is designed to satisfy the growing demands of researchers, professionals, and graduate students.Both conventional and non-conventional fabrication technologies are introduced with emphasis on multidisciplinary principles, methodologies, and practical applications. While conventional technologies consider the emerging techniques developed for next generation lithography, non-conventional techniques include scanning probe microscopy lithography, self-assembly, and imprint lithography, as well as techniques specifically developed for making carbon tubes and molecular circuits and devices.

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Non-Fiction Engineering & Technology Technology in General Nanotechnology Industrial Chemistry & Manufacturing Technologies Mechanical Engineering & Materials Materials Science Booktopia Publisher Services World Scientific Publishing

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Published: 18th March 2008

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Preface	p. vii
Atom, Molecule, and Nanocluster Manipulations for Nanostructure Fabrication Using Scanning Probe Microscopy	p. 1
Atomic Force Microscope Lithography	p. 33
Scanning Probe Arrays for Nanoscale Imaging, Sensing, and Modification	p. 65
Using Biomolecules for Self-Assembly of Engineered Nano-Scale Structures and Devices	p. 127
Nanofabrication Based on Self-Assembled Alumina Templates	p. 159
Nanowire Assembly and Integration	p. 187
Taper-Drawing Fabrication of Glass Nanowires	p. 213
Extreme Ultraviolet Lithography	p. 235
Electron Projection Lithography	p. 285
Electron Beam Direct Writing	p. 341
Electron Beam Induced Deposition	p. 377
High-Resolution Electron-Beam-Induced Deposition	p. 399
Focused Ion Beams and Interaction with Solids	p. 431
Nano/Microstructuring of Ceramic Surfaces by Unconventional Lithographic Methods	p. 471
Alternative Nanofabrication Approaches for Non-CMOS Applications	p. 499
Nanofabrication of Nanoelectromechanical Systems (NEMS): Emerging Techniques	p. 543
Index	p. 567
Table of Contents provided by Ingram. All Rights Reserved.

NANOFABRICATION

FUNDAMENTALS & APPN

At a Glance

Paperback

Shipping

How to return your order

Defective items

You Can Find This Book In

Other Editions and Formats

Hardcover

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