Plasma Science and Technology

Preface xxxi

Part I Plasma Fundamentals: Kinetics, Thermodynamics, Fluid Mechanics, and Electrodynamics 1

Lecture 1 The Major Component of the Universe, the Cornerstone of Microelectronics, The High-Tech Magic Wand of Technology 3

Lecture 2 Elementary Processes of Charged Particles in Plasma 17

Lecture 3 Elementary Processes of Excited Atoms and Molecules in Plasma 43

Lecture 4 Physical Kinetics and Transfer Processes of Charged Particles in Plasma 71

Lecture 5 Physical and Chemical Kinetics of Excited Atoms and Molecules in Plasma 89

Lecture 6 Plasma Statistics and Thermodynamics, Heat and Radiation Transfer Processes 111

Lecture 7 Plasma Electrostatics and Electrodynamics, Waves in Plasma 133

Lecture 8 Plasma Magneto-hydrodynamics, Fluid Mechanics and Acoustics 151

Part II Plasma Physics and Engineering of Electric Discharges 173

Lecture 9 Electric Breakdown, Steady-state Discharge Regimes, and Instabilities 175

Lecture 10 Nonthermal Plasma Sources: Glow Discharges 197

Lecture 11 Thermal Plasma Sources: Arc Discharges 219

Lecture 12 Radio-frequency, Microwave, and Optical Discharges 245

Lecture 13 Atmospheric Pressure Cold Plasma Discharges: Corona, Dielectric Barrier Discharge (DBD), Atmospheric Pressure Glow (APG), Plasma Jet 277

Lecture 14 Nonequilibrium Transitional “Warm” Discharges: Nonthermal Gliding Arc, Moderate-pressure Microwave Discharge, Different Types of Sparks and Microdischarges 297

Lecture 15 Ionization and Discharges in Aerosols; Dusty Plasma Physics; Electron Beams and Plasma Radiolysis 311

Lecture 16 Electric Discharges in Water and Other Liquids 331

Part III Plasma in Inorganic Material Treatment, Energy Systems, and Environmental Control 343

Lecture 17 Energy Balance and Energy Efficiency of Plasma-chemical Processes, Plasma Dissociation of CO₂ 345

Lecture 18 Synthesis of Nitrogen Oxides, Ozone, and Other Gas-phase Plasma Synthetic and Decomposition Processes 367

Lecture 19 Plasma Metallurgy: Production and Processing of Metals and their Compounds 391

Lecture 20 Plasma Powders, Micro- and Nano-technologies: Plasma Spraying, Deposition, Coating, Dusty Plasma-chemistry 411

Lecture 21 Plasma Processing in Microelectronics and Other Micro-technologies: Etching, Deposition, and Ion Implantation Processes 431

Lecture 22 Plasma Fuel Conversion and Hydrogen Production, Plasma Catalysis 455

Lecture 23 Plasma Energy Systems: Ignition and Combustion, Thrusters, High-speed Aerodynamics, Power Electronics, Lasers, and Light Sources 481

Lecture 24 Plasma in Environmental Control: Cleaning of Air, Exhaust Gases, Water, and Soil 505

Part IV Organic and Polymer Plasma Chemistry, Plasma Medicine, and Agriculture 523

Lecture 25 Organic Plasma Chemistry: Synthesis and Conversion of Organic Materials and Their Compounds, Synthesis of Diamonds and Diamond Films 525

Lecture 26 Plasma Polymerization, Processing of Polymers, Treatment of Polymer Membranes 545

Lecture 27 Plasma Biology, Nonthermal Plasma Interaction with Cells 567

Lecture 28 Plasma Disinfection and Sterilization of Different Surfaces, Air, and Water Streams 587

Lecture 29 Plasma Agriculture and Food Processing, Chemical and Physical Properties of Plasma-activated Water, Fundamentals and Applications to Wash and Disinfect Produce 607

Lecture 30 Plasma Medicine: Safety, Selectivity, and Efficacy; Penetration Depth of Plasma-Medical Effects; Standardization and Dosimetry 639

Lecture 31 Plasma Medicine: Healing of Wounds and Ulcerations, Blood Coagulation 665

Lecture 32 Plasma Medicine: Dermatology and Cosmetics, Dentistry, Inflammatory Dysfunctions, Gastroenterology, Cardiovascular, and Other Diseases, Bioengineering and Regenerative Medicine, Cancer Treatment and Immunotherapy 687

Afterword and Acknowledgements 717

References 721

Index 741