| Preface & Acknowledgements | p. xvii |
| Introduction to precision manufacturing | p. 1 |
| Precision engineering | p. 1 |
| Precision manufacturing | p. 2 |
| Competitive drivers of precision manufacturing | p. 7 |
| Historical developments in manufacturing | p. 9 |
| Background | p. 9 |
| Key drivers | p. 13 |
| Historical examples | p. 16 |
| Organization of this book | p. 33 |
| Machine design for precision manufacturing | p. 37 |
| Background on machine design for manufacturing | p. 37 |
| Philosophy of precision machine design | p. 39 |
| Sources of error - overview | p. 41 |
| Principles of measurement | p. 49 |
| Definition of terms - accuracy, repeatibility, and resolution | p. 49 |
| Accuracy | p. 49 |
| Repeatability (or precision) | p. 53 |
| Resolution | p. 54 |
| Probabilistic measure of accuracy | p. 55 |
| Metrology and measurement | p. 57 |
| Abbé's principle | p. 64 |
| Metrology techniques | p. 67 |
| Measurement of dimension and angle | p. 67 |
| Measurement of form | p. 73 |
| Straightness | p. 73 |
| Flatness | p. 84 |
| Roundness | p. 88 |
| Other form errors | p. 99 |
| Measurement of surface roughness | p. 99 |
| Kinematic precision | p. 110 |
| Subsurface damage | p. 112 |
| Mechanical errors | p. 121 |
| Introduction | p. 121 |
| Errors due to machine elements (excluding bearings) | p. 123 |
| Kinematic design | p. 128 |
| Connectivity | p. 128 |
| Kinematic elements | p. 129 |
| Contact and complex support | p. 133 |
| Summary of kinematic design | p. 142 |
| Structural compliance | p. 143 |
| Microscale compliance | p. 143 |
| Macroscale compliance | p. 145 |
| Bearings and spindles | p. 153 |
| Bearings | p. 153 |
| Aerostatic bearings and spindles | p. 163 |
| Thermal errors | p. 167 |
| Background on the thermal error problem | p. 167 |
| Thermal effects in precision engineering | p. 171 |
| Determining the effect of temperature other than 20°C | p. 180 |
| Free and constrained bodies | p. 181 |
| Effect of spatial temperature gradients | p. 184 |
| Effect of temperature transients: soak-out time and sinusoidal response | p. 187 |
| Conductive, convective, and radiative heat transfer parameters | p. 193 |
| Specific heat sources and examples of thermal problems | p. 196 |
| Environmental control of precision machinery | p. 202 |
| Machine enclosures | p. 203 |
| Factory and room enclosures | p. 204 |
| Machine treatment without enclosures | p. 206 |
| Thermal effects and metrology | p. 208 |
| Observations | p. 215 |
| Error mapping and error budgets | p. 217 |
| Introduction | p. 217 |
| Error mapping | p. 218 |
| Error budget | p. 232 |
| Definition of error budget | p. 232 |
| Error budget flow chart | p. 233 |
| Combinational rules for errors | p. 234 |
| Error due to compliance and vibration | p. 239 |
| Introduction | p. 239 |
| Excitations in machine tools | p. 243 |
| Weight deformation | p. 246 |
| Cutting force deformation | p. 249 |
| Type A deformation: Deformation due to the variation of the cutting force | p. 250 |
| Introduction and background | p. 250 |
| Examples for single edge cutting | p. 254 |
| Machine stiffness and directional orientation | p. 256 |
| Type B deformation: Deformation due to the variation of the stiffness along the tool path | p. 263 |
| Comparison of the errors from deformation types A and B | p. 267 |
| Forced vibrations | p. 272 |
| Self-excited vibrations (chatter) | p. 273 |
| Introduction | p. 273 |
| Basic stability; effect of structural dynamics | p. 278 |
| Variation of spindle speed and stability lobes | p. 288 |
| Advanced analysis | p. 292 |
| Sensors for precision manufacturing | p. 295 |
| Introduction | p. 295 |
| The relevance of precision manufacturing and the need for in-process monitoring and control | p. 295 |
| Requirements for sensor technology for precision manufacturing | p. 297 |
| Overview of sensors in manufacturing | p. 300 |
| Introduction | p. 300 |
| Sensor systems for process monitoring | p. 303 |
| New developments in signal and information processing for tool condition monitoring | p. 308 |
| Introduction | p. 308 |
| Intelligent sensors | p. 311 |
| Implementation strategies | p. 314 |
| Multisensor approaches | p. 316 |
| Sensors for high speed machining | p. 317 |
| Acoustic emission in manufacturing | p. 320 |
| Background | p. 320 |
| Acoustic emission sources-diagnostics | p. 322 |
| Acoustic emission sources-process monitoring | p. 323 |
| Acoustic emission in machining | p. 325 |
| Signal processing, feature extraction and sensor fusion | p. 334 |
| Introduction | p. 334 |
| Intelligent sensor defined | p. 337 |
| Sensor fusion defined | p. 338 |
| Fusion methodologies | p. 339 |
| Neural networks | p. 341 |
| Applications of signal processing and sensor fusion | p. 349 |
| Introduction | p. 349 |
| Tool wear detection using time series analysis of acoustic emission | p. 350 |
| Time series analysis | p. 351 |
| Experimental evaluation | p. 355 |
| Sensor integration using neural networks for intelligent tool condition monitoring | p. 358 |
| Use of multiple sensors | p. 360 |
| Experimental evaluation | p. 363 |
| The need for engineering models to design and predict the performance of in-process sensors | p. 369 |
| Basic sensor classification and new sensing technologies | p. 372 |
| Introduction | p. 372 |
| Basic sensor types | p. 377 |
| Mechanical sensors | p. 377 |
| Thermal sensors | p. 380 |
| Electrical sensors | p. 382 |
| Magnetic sensors | p. 382 |
| Radiant sensors | p. 383 |
| Chemical sensors | p. 383 |
| Applications of sensors in precision manufacturing | p. 384 |
| AE-based monitoring of grinding wheel dressing | p. 384 |
| Fast AE RMS analysis for wheel condition monitoring | p. 385 |
| Grinding wheel topographical mapping | p. 387 |
| Wheel wear mechanism | p. 389 |
| AE-based monitoring of face milling | p. 390 |
| AE-based monitoring of chemical mechanical planarization | p. 393 |
| Monitoring of abrasive process parameters | p. 395 |
| Precision scribing of CMP-treated wafers | p. 398 |
| AE-based endpoint detection for CMP | p. 401 |
| AE monitoring of surface chemical reactions for copper CMP | p. 403 |
| AE characteristics of oxidation and dissolution in copper CMP | p. 411 |
| Monitoring of precision scribing | p. 416 |
| Monitoring of ultraprecision Turning of Single crystal copper | p. 418 |
| Monitoring of ultraprecision turning of polycrystalline copper | p. 421 |
| Summary | p. 422 |
| Process planning for precision manufacturing | p. 425 |
| Manufacturing system characteristics | p. 425 |
| Process planning basics | p. 435 |
| Process capability | p. 438 |
| Background | p. 438 |
| Process capability defined | p. 440 |
| Cp as a planning metric | p. 444 |
| Legacy-system integration for precision manufacturing | p. 451 |
| Future integration for precision manufacturing process planning | p. 452 |
| Precision machining processes | p. 455 |
| Introduction | p. 455 |
| Influence of machining parameters, work material, and tool geometry | p. 462 |
| Influence of uncut chip thickness | p. 462 |
| Machining brittle materials | p. 465 |
| Effects of work material crystallography/directionality | p. 472 |
| Process operating conditions | p. 478 |
| Precision mfg. processes-diamond turning/milling | p. 482 |
| Introduction | p. 482 |
| Machine tool design | p. 484 |
| Tool design and alignment | p. 491 |
| Chip formation and process mechanics | p. 496 |
| Abrasive processes - fixed and loose | p. 505 |
| Fixed abrasive processes | p. 505 |
| Material removal mechanisms | p. 505 |
| Grinding forces, power and specific energy | p. 512 |
| Grinding stiffness, contact stiffness and process time constant | p. 517 |
| Nanogrinding | p. 520 |
| Loose abrasive processes | p. 521 |
| Polishing and lapping | p. 522 |
| Chemical mechanical planarization (CMP) | p. 532 |
| Process modeling in CMP | p. 540 |
| Non-traditional processes | p. 551 |
| Precision manufacturing applications and challenges | p. 555 |
| Introduction | p. 555 |
| Basic semiconductor device manufacturing | p. 559 |
| Introduction | p. 559 |
| So, what are they anyway and how are they made? | p. 561 |
| Microfabrication: background and overview | p. 561 |
| Lithography | p. 564 |
| Applications of semiconductor manufacturing - MEMS | p. 570 |
| Nanotechnology | p. 572 |
| Background and definitions | p. 572 |
| Nanostructured materials | p. 576 |
| Nanofabrication techniques | p. 578 |
| E-beam and nano-imprint Fabrication | p. 582 |
| Epitaxy and strain engineering | p. 585 |
| Quantum structure nanofabrication using epitaxy on patterned substrates | p. 585 |
| Quantum structure nanofabrication using strain-induced self-assembly | p. 587 |
| Scanned probe techniques | p. 589 |
| Self-assembly | p. 595 |
| MEMS and nanotechnology applications | p. 600 |
| Nanotechnology applications | p. 601 |
| Micro-machining and small scale defects | p. 604 |
| Introduction | p. 604 |
| Surface and edge finish | p. 607 |
| Modeling | p. 611 |
| Finite element modeling | p. 613 |
| Molecular dynamics | p. 615 |
| Multiscale modeling | p. 619 |
| Mechanistic modeling | p. 620 |
| Workpiece and design issues | p. 622 |
| Micromolding | p. 622 |
| Creation of micropattern and microstructure | p. 625 |
| Creation of 3-dimensional shapes | p. 630 |
| Ultrasonic vibration assisted micromachining | p. 631 |
| Micro-tools | p. 633 |
| Cutting fluid | p. 638 |
| Metrology in micromachining | p. 640 |
| Conclusion and outlook | p. 644 |
| Burrs - preventing and minimizing burr formation in precision components | p. 646 |
| Introduction and background | p. 647 |
| Process-based solutions | p. 651 |
| Milling | p. 652 |
| Drilling | p. 654 |
| Examples of application of burr minimization strategies | p. 657 |
| Tool path planning in milling | p. 657 |
| Burr control chart | p. 660 |
| Integrated process planning and burr minimization | p. 661 |
| Summary and conclusions | p. 662 |
| Future of precision manufacturing | p. 665 |
| Introduction | p. 665 |
| The manufacturing pipeline | p. 666 |
| Sustainable design/environmentally conscious design and manufacturing | p. 669 |
| Technologies for sustainable manufacturing | p. 670 |
| Green manufacturing pipeline | p. 671 |
| Sustainable manufacturing or ""does green = sustainable?"" | p. 676 |
| Manufacturing technology wedges | p. 678 |
| Examples of wedge technology application areas for manufacturing | p. 680 |
| Consumable use in machining | p. 681 |
| Energy use in nanoscale manufacturing | p. 685 |
| Environmentally conscious design of precision machines | p. 693 |
| Sustainability budgets | p. 694 |
| Constructing the sustainability budget | p. 696 |
| Summary comments/conclusion | p. 701 |
| References | p. 705 |
| Index | p. 765 |
| Table of Contents provided by Publisher. All Rights Reserved. |