Precision Motion Control

Design and Implementation

By: Kok Kiong Tan, Tong Heng Lee, Sunan Huang

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eText | 29 November 2007 | Edition Number 2

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Precision Motion Control focuses on enabling technologies for precision engineering - issues of direct importance to be addressed in the overall system design and realization: precision instrumentation and measurement, geometrical calibration and compensation, and motion control. It is a compilation of the most important results and publications from a major project that develops a state-of-the-art, high-speed, ultra-precision robotic system. The second edition has been edited and rewritten throughout with the following particular areas being expanded or added: - piezoelectric actuators; - fine movement control; - gantry-stage control; - interpolation of quadrature encoder signals; - geometrical error modelling for single-, dual- and general-XY-axis stages. By providing detailed experimental verifications of the material developed, a comprehensive and thorough treatment of the subject matter, accessible to a broad base of readers, ranging from academics to practitioners, is provided.