Precision Nanometrology

Sensors and Measuring Systems for Nanomanufacturing

By: Wei Gao

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Hardcover | 28 June 2010

At a Glance

Hardcover
372 Pages

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24.13 x 16.51 x 1.91

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Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. It pays particular attention to the measurement of surface forms of precision workpieces and to stage motions of precision machines. The first half of the book is dedicated to the description of optical sensors for the measurement of angle and displacement, which are fundamental quantities for precision nanometrology. The second half presents a number of scanning-type measuring systems for surface forms and stage motions. The systems discussed include: â¢ error separation algorithms and systems for measurement of straightness and roundness, â¢ the measurement of micro-aspherics, â¢ systems based on scanning probe microscopy, and â¢ scanning image-sensor systems. Precision Nanometrology presents the fundamental and practical technologies of precision nanometrology with a helpful selection of algorithms, instruments and experimental data. It will be beneficial for researchers, engineers and postgraduate students involved in precision engineering, nanotechnology and manufacturing.

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Angle Sensor for Measurement of Surface Slope and Tilt Motion	p. 1
Introduction	p. 1
Angle Sensor with Quadrant Photodiode	p. 2
Angle Sensor with Photodiode Array	p. 15
Angle Sensor with Single-cell Photodiode	p. 28
Summary	p. 31
References	p. 33
Laser Autocollimator for Measurement of Multi-axis Tilt Motion	p. 35
Introduction	p. 35
Two-axis Laser Autocollimator	p. 36
One-lens Laser Micro-autocollimator	p. 53
Three-axis Laser Autocollimator	p. 56
Summary	p. 67
References	p. 67
Surface Encoder for Measurement of In-plane Motion	p. 69
Introduction	p. 69
Surface Encoder for MDOF In-plane Motion	p. 70
Multi-probe-type MDOF Surface Encoder	p. 70
Scanning Laser Beam-type MDOF Surface Encoder	p. 83
Fabrication of Two-axis Sinusoidal Grid for Surface Encoder	p. 90
Fabrication System	p. 90
Analysis and Compensation of Fabrication Error	p. 91
Application of Surface Encoder in Surface Motor-driven Planar Stage	p. 99
Stage System	p. 99
Stage Performance	p. 104
Summary	p. 107
References	p. 107
Grating Encoder for Measurement of In-plane and Out-of-plane Motion	p. 109
Introduction	p. 109
Two-degree-of-freedom Linear Grating Encoder	p. 110
Three-axis Grating Encoder with Sinusoidal Grid	p. 129
Three-axis Grating Encoder with Rectangular XY-grid	p. 136
Summary	p. 140
References	p. 140
Scanning Multi-probe System for Measurement of Roundness	p. 143
Introduction	p. 143
Three-slope Sensor Method	p. 144
Mixed Method	p. 157
Summary	p. 169
References	p. 173
Scanning Error Separation System for Measurement of Straightness	p. 175
Introduction	p. 175
Three-displacement Sensor Method with Self Zero-adjustment	p. 175
Three-displacement Sensor Method and Zero-adjustment Error	p. 175
Three-displacement Sensor Method with Self Zero-adjustment	p. 180
Error Separation Method for Machine Tool Slide	p. 195
Slide Straightness Error of Precision Machine Tool	p. 195
Error Separation Method for Slide Straightness Measurement	p. 195
Summary	p. 208
References	p. 210
Scanning Micro-stylus System for Measurement of Micro-aspherics	p. 211
Introduction	p. 211
Compensation of Scanning Error Motion	p. 212
Micro-stylus Probe	p. 225
Micro-ball Glass Tube Stylus	p. 225
Tapping-type Micro-stylus	p. 233
Small-size Measuring Instrument for Micro-aspherics	p. 237
Summary	p. 242
References	p. 242
Large Area Scanning Probe Microscope for Micro-textured Surfaces	p. 245
Introduction	p. 245
Capacitive Sensor-compensated Scanning Probe Microscope	p. 246
Linear Encoder-compensated Scanning Probe Microscope	p. 258
Spiral Scanning Probe Microscope	p. 266
Summary	p. 279
References	p. 281
Automatic Alignment Scanning Probe Microscope System for Measurement of 3D Nanostructures	p. 283
Introduction	p. 283
Optical Probe for Automatic Alignment	p. 285
Alignment Principle	p. 285
Alignment Procedure	p. 288
Instrumentation of the Automatic Alignment AFM	p. 299
Instrument Design	p. 299
Instrument Performance	p. 305
Summary	p. 317
References	p. 318
Scanning Image-sensor System for Measurement of Micro-dimensions	p. 321
Introduction	p. 321
Micro-width Measurement by Scanning Area-image Sensor	p. 322
Micro-width of Long Tool Slit	p. 322
Evaluation of Slit Width	p. 323
Scanning Area-image Sensor	p. 327
Slit Width Measurement in Production Line	p. 331
Micro-radius Measurement by Scanning Line-image Sensor	p. 335
Micro-radius of Long Tool Edge	p. 335
Evaluation of Edge Radius	p. 336
Edge Radius Measurement in Production Line	p. 341
Summary	p. 350
References	p. 351
Index	p. 353
Table of Contents provided by Ingram. All Rights Reserved.

Precision Nanometrology

Sensors and Measuring Systems for Nanomanufacturing

At a Glance

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