CCD Image Sensors in Deep-Ultraviolet

Cover -- Title Page -- Preface -- Contents -- 1 Introduction -- 1.1 Motivation: CCD for DUV Imaging -- 1.2 Outline of the Book. -- Part I CCD Image Sensors -- 2 Overview of CCD. -- 2.1 Fundamentals of Solid-State Imaging -- 2.2 CCD Response and Quantum Efficiency -- 2.3 Dark Current -- 2.4 Charge Conversion Efficiency (CCE) -- 3 CCD Imaging in the Ultraviolet (UV) Regime. -- 3.1 Ultraviolet (UV) Spectrum -- 3.2 Applications of CCD in DUV -- 3.3 Techniques to Improve UV Sensitivity -- 3.4 Challenges of DUV Detection Using CCDs -- Part II Instabilities in Si, SiO2, and the Si-SiO2 Interface -- 4 Silicon -- 4.1 Optical Properties of Si -- 4.2 Defects in Si -- 4.3 Si Wafers for CCDs -- 5 Silicon Dioxide -- 5.1 Basic Properties of SiO2 -- 5.2 Defects in SiO2 -- 5.3 Instability in Si-Based Devices due to Defects in SiO2 -- 6 Si-SiO2 Interface -- 6.1 Physical Structure of the Si-SiO2 Interface -- 6.2 Defects at the Interface -- Part III Effects of Radiation on the Si-SiO2 System -- 7 General Effects of Radiation -- 7.1 Overview of Radiation Effects on Matter -- 7.2 Radiation-Induced Defects in Si, SiO2, and Si-SiO2 Interface -- 7.3 Effects of Radiation on Basic Semiconductor Devices -- 8 Effects of Radiation on CCDs. -- 8.1 Overview of the Radiation Damages in CCDs . -- 8.2 Ionization Damage in CCDs -- Part IV Interaction of UV Radiation with the Si-SiO2 System -- 9 UV-Induced Effects in Si -- 9.1 Photoemission in Si -- 10 UV Laser Induced Effects in SiO2 -- 10.1 Overview of UV Laser Induced Effects in SiO2 -- 10.2 Active Defects in DUV -- 10.3 KrF and ArF Laser Induced Effects in SiO2 -- 10.4 F2 Laser Induced Effects in SiO2 -- 10.5 UV-Induced Charging of SiO2 -- 10.6 Summary of the UV-Induced Effects in SiO2 -- 11 UV Laser Induced Effects at the Si-SiO2 Interface -- Part V Interaction of DUV Radiation with CCD Sensors -- 12 CCD Measurements at 157nm. -- 12.1 Experiment Description -- 12.2 Experimental Results -- 12.3 Analysis of DUV Damage Mechanisms -- 12.4 Post-157nm Measurements -- 12.5 Response Measurement of Photodiodes at 157nm. -- 12.6 Summary of CCD Behavior at 157nm. -- 12.7 Future Investigations -- Part VI Concluding Remarks & Future Research -- 13 Design Optimizations for Future Research -- 13.1 Optimization Techniques Based on UV Photodiodes -- 13.2 Optimization Techniques Based on DUV Silica Glass -- 14 Concluding Remarks -- 14.1 Conclusions -- 14.2 Recommendations -- Glossary and Definition of Acronyms -- References.